The Power Module Manufacturing equipment realizes low-temperature vacuum bonding my sputtering and brazing metals based on AMB technology.
This is followed by processes such as etching and printing, with full process automation to maximize productivity and efficiency, optimize quality, and reduce costs.
Inline Sputter
(Horizontal Type)
Specification
Layout: 12,010mm x 7,059mm x 3,560mm
Weight: about 30,000kg
Pass Line: 2,450mm
Substrate Size: 140mm x 190mm; various sizes available
Power: AC 200 ~ 440V
Cathode Type: Magnetron Rotary Cathode (DC or Pulsed DC)
Target: Metal Alloy Composite
Sputter
(Batch Type)
Specification
Layout: 3,900mm x 1,900mm x 2,880mm
Weight: about 5,000kg
Substrate Size: 140mm x 190mm; various sizes available
Power: AC 200 ~ 440V
Cathode Type: Single Magnetron Cathode (DC or Pulsed DC)
Target: Metal Alloy Composite
Brazing Furnace
Specification
Layout: 3,000mm x 3,000mm x 3,200mm
Weight: about 6,000kg
Operating Temp: Up to 1,300°C
Degree of Vac: 5 x 10-6 Torr
Power: AC 220V